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How much accuracy can be achieved by photodiode array imaging?

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in Engineering Metrology by (829k points)
How much accuracy can be achieved by photodiode array imaging?

(a) ±0.05 μm

(b) ±0.15 μm

(c) ±0.5 μm

(d) ±0.25 μm

This question was posed to me in exam.

My doubt is from Laser Inspection topic in chapter Machine Vision Systems of Engineering Metrology

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Best answer
The correct answer is (a) ±0.05 μm

Best explanation: In photodiode array imaging method which is a laser inspection technique in which the stationary part’s shadow is projected on a solid-state diode array image sensor. For large parts, 2 arrays are used i.e. one array for each edge. Accuracies as high as ±0.05 μm can be achieved by this method.

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